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| Fabrication and test of reaction bond silicon carbide for optical applications | |
| 作者单位： | Center for Composite Materials Harbin Inst itute of Technology Harbin 150001 China，Center for Composite Materials Harbin Inst itute of Technology Harbin 150001 China，Center for Composite Materials Harbin Inst itute of Technology Harbin 150001 China，Center for Composite Materials Harbin Inst itute of Technology Harbin 150001 China |
| 摘 要： | 1 Introduction Silicon carbide may be the best material available for mirror optics because of its outstanding combination of thermal and mechanical properties[1?3]. This material has remarkable dimensional stability even under the disturbances of tempera… |
| 关 键 词： | 碳化硅 应用光学 制备 测试 |
| 收稿时间： | 2005-03-21 |
| 修稿时间： | 2005-11-08 |
Fabrication and test of reaction bond silicon carbide for optical applications |
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| YAO Wang,ZHANG Yu-min,HAN Jie-cai,ZUO Hong-bo. Fabrication and test of reaction bond silicon carbide for optical applications[J]. Transactions of Nonferrous Metals Society of China, 2006, 16(2): 409-413. DOI: 10.1016/S1003-6326(06)60070-8 | |
| Authors: | YAO Wang ZHANG Yu-min HAN Jie-cai ZUO Hong-bo |
| Affiliation: | 1. Centre for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, China;2. State Key Laboratory of Ultra-precision Machining Technology, The Hong Kong Polytechnic University, Hong Kong, China |
| Abstract: | A reaction bonding fabrication process using various grain size of SiC powder was investigated. The properties such as mechanical, thermal and physic property were tested and analyzed. RBSiC produced using this process is a polycrystalline material and has high specific stiffness (density of 3.09 g/cm3 with elastic modulus of 362.39 GPa), strength (269.64 MPa) and hardness (19.43 GPa). At room temperature its low CTE (3.47 × 10−6/K), combined with relatively high thermal conductivity (161.14 W/mK) and specific heat capacity (593.86 J/kg·K) can minimize the bothersome thermal distortion. This advantage is outstanding even at higher temperature of test range. Two d 250 mm RBSiC mirror were polished. Surface roughness value less than 5 nm was obtained. Results prove that this reaction bonding process is a feasible method to produced high quality RBSiC optical mirror. |
| Keywords: | RBSiC silicon carbide fabrication optical applications polishability property measurement |
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