拼接干涉测量技术

利用相关拼接技术实现光学波面检测，可以用较小的测量口径实现较大面积的测量，并保持高的测量精度、高的空间分辨率和系统的低成本。获得高精度的子孔径波面分布和有效的拼接方法是这一技术的关键。简述了采用相移技术测量子孔径波面的关键技术。两个子孔径之间的拼接是比较容易的，但采用两两拼接的方法会有很大的误差累积。因此采用了具有误差均化作用的拼接方法，该方法本质上是一种并行的方法。文中简述了该拼接方法的数学模型和求解方法。最后给出了拼接的实测结果。

Stitching Interferometry Technique

Testing optical wavefront by correlative stitching technique is meaningful in extending spatial measurement ranges,keeping high resolutions,high precision and low cost.Getting high precision phase distributions of sub apertures and effectively stitching them together are the key tasks.The paper describes the main techniques in sub aperture testing by phase stepping interferometer.Stitching between two sub apertures is simple but its accumulation error may reduce stitching precision greatly.The paper presents an error averaging method,which is a parallel one essentially.The math model and solving method in Cartesian coordinates are described.Finally,the paper presents some testing results.