带腐蚀性物料的真空系统在线检漏方法研究

带腐蚀性物料的真空系统，往往对密封性要求严格。为了进行带腐蚀性物料的真空系统在线检漏而进行研究，分析可行的检漏方法，提出适用手段。通过分析，经过分级冷冻、物料处理及选用适合的检漏步骤，能够使氦质谱检漏仪满足负压检漏条件，从而使用喷氦法确定漏点位置，使用氦罩法获得准确的漏率。实际应用证明，该方法用于带腐蚀性物料的真空系统在线检漏，能够准确、有效的检测漏点位置及漏率。该研究为带腐蚀性物料的真空系统在线检漏提供了技术支持。

STUDY OF ONLINE LEAK DETECTING METHOD OF VACUUM SYSTEM WHICH CONTAIN CORROSIVE MATERIALS

Vacuum system which contain of corrosive metearals is always strict for leakages. This paper reasearched the online leak detecting methods of vacuum system which contain of corrosive metearals. It analyzed relatively leak de-tecting methods,supplied a suitable way. First,dealt with corrosive metearals,elected suitable leak detecting steps,made the leak detector fulfilled with its working condition,then used helium cumulated method to acquire leakage rates. The re-sult indicate that the method could detect the vacuum system online leakage exactly and availability. The study provide an assistant technique for the online leakage detecting of vacuum system which contain corrosive metearals.