Laterally chromatically dispersed, spectrally encoded interferometer |
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Authors: | Gronle Marc Lyda Wolfram Mauch Florian Osten Wolfgang |
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Affiliation: | Institut für Technische Optik, University Stuttgart, Stuttgart, Germany. gronle@ito.uni‐stuttgart.de |
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Abstract: | We present a single-shot line sensor based on spectral interferometry. Light of a broadband laser source is chromatically dispersed by a grating and focused onto a line on the surface such that each focal point on this line is formed by another wavelength. The entire height profile is obtained by applying a phase evaluation algorithm to the registered interference signal, followed by a model-based approach. The sensor concept is finally verified by experimental results. |
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