| JBX－6A2电子束曝光机图形数据转换软件的开发与应用 |
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| 引用本文： | 唐剑,刘祖京,王国明,曹志峰.JBX－6A2电子束曝光机图形数据转换软件的开发与应用[J].电工电能新技术,1995(4). |
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| 作者姓名： | 唐剑 刘祖京 王国明 曹志峰 |
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| 作者单位： | 中国科学院电工研究所 |
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| 摘 要： | 本文简要介绍了一种矩形电子束曝光机图形转换软件的结构、工作原理和工作过程。在此前提下，根据这套软件的实际工作情况简要介绍了使用该软件的具体方法，并对使用该软件时容易遇到的困难和一些应注意的细节做了清楚的说明。此外还简略说明了作者对该软件所做的几处修改。
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| 关 键 词： | 图形数据文件，数据格式，数据转换 |
ANALYSIS AND MODIFICATION OF THE DATA CONVERSION SOFTWARE FOR THE VARIABLE-SHAPED E-BEAM LITHOGRAPHY SYSTEM |
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| TANG Jian,LIU Zujing,WANG Guoming,CAO Zhifeng.ANALYSIS AND MODIFICATION OF THE DATA CONVERSION SOFTWARE FOR THE VARIABLE-SHAPED E-BEAM LITHOGRAPHY SYSTEM[J].Advanced Technology of Electrical Engineering and Energy,1995(4). |
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| Authors: | TANG Jian LIU Zujing WANG Guoming CAO Zhifeng |
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| Abstract: | This paper presents a kind of data conversion software used in the variable-shaped e-beam lithography,especially on its composition,working theory and working procedure.The paper tells how to use this software package,Moreover,it describes some difficultiesand warning items that may be present in procedure. Some modifications in the softwaremade by authors are presented in this paper also. |
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| Keywords: | patter data file data format data conversion |
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