| 三维面型的绝对测量 |
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| 引用本文： | 田爱玲,郑显锋,刘丙才,王红军,王春慧,郑颖.三维面型的绝对测量[J].西安工业大学学报,2012(6):431-436. |
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| 作者姓名： | 田爱玲 郑显锋 刘丙才 王红军 王春慧 郑颖 |
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| 作者单位： | [1]西安工业大学光电工程学院,西安710032 [2]西安航空技术高等专科学校,西安710065 [3]西安航天计量测试研究所,西安710100 |
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| 基金项目： | 国家自然科学基金（51075322）;西安市科技计划（CXY1013）;教育部留学回国人员科研启动基金资助项目;陕西省教育厅科学研究计划项目（11JK0904,09JK487） |
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| 摘 要： | 传统的三平面互检法与ZYGO干涉仪自带的three-flats程序都不能实现三个平面的三维面型测量.以ZYGO干涉仪的GPI程序为基础,通过对仪器的局部改装,实现对三个平面的三维面型测量的一种改进的三平面互检法.将改进的三平面互检法的结果取其纵向面型信息与ZYGO干涉仪中three-flats程序直接测得的三个平面纵向面型的测量结果进行比较,结果PV值误差在0.001λ以内.验证了此法的准确性和可行性,为干涉法测量高精度面型技术的发展提供有力的支持.
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| 关 键 词： | 干涉测量 绝对检验 三平面互检 方位角平均算法 |
Absolute Measurement of 3D Surface |
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| Authors: | TIAN Ai-ling ZHENG Xian-feng LIU Bing-cai WANG Hong-jun WANG Chun-hui ZHENG Ying |
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| Affiliation: | 1. School of Optoelectronic Engineering, Xi＇ an Technological University, Xi＇ an 710032, China 2. Xi＇an Aerotechnical College,Xi＇an 710065; 3. Xi＇an Aerospace Institute of Measuring and Testing, Xi＇ an 710100,China) |
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| Abstract: | The traditional three-flat test and three-flat program with the ZYGO interferometer （Model： Verifire PE） can not measure the three flats of three-dimension. An improved three-flat test, based on the GPI program of the ZYGO interferometer, with partial modification of the instrument achieve the measurement of three flats of three-dimension. Compared the vertical information of the results of the improved three-flat test and the vertical information directly measured by the three-flats program of the ZYGO interferometer, the results of the PV error is less than 0. 001λ. The accuracy and feasibility of this method has been verified. This method will provide strong support for the precision measurement technology of interference. |
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| Keywords: | interference measure absolute test three-flat test azimuthal average |
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