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High aspect ratio spiral and vertical meander micro coils for actuator applications |
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| Authors: | V. Seidemann T. Kohlmeier M. Föhse H. H. Gatzen S. Büttgenbach |
| Affiliation: | (1) Institute for Microtechnology, Technical University of Braunschweig, Langer Kamp 8, D-38106 Braunschweig, Germany;(2) Institute for Microtechnology, Hanover University, Callinstr. 30A, D-30167 Hanover, Germany |
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| 本文献已被 SpringerLink 等数据库收录！ | |