| Ti/AlN陶瓷界面反应的热力学研究 |
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| 引用本文： | 吴铧,沈电洪.Ti/AlN陶瓷界面反应的热力学研究[J].真空科学与技术学报,1995(3). |
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| 作者姓名： | 吴铧 沈电洪 |
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| 作者单位： | 中国科学院化工冶金研究所!北京100083(吴铧)，中国科学院物理研究所!北京100083(沈电洪) |
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| 摘 要： | 对AlN陶瓷在室温和超高真空条件下蒸镀金属钛过程的界面反应进行了热力学研究，并用X光电子能谱（XPS）进行了验证，表明在金属钛沉积以前AlN陶瓷在空气中表面部分被氧化，当样品沉积了金属钛后，刚沉积上的钛是氧化状态，随着钛沉积厚度的增加，表面TiN和Al2O3的成分都增加。
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| 关 键 词： | AlN陶瓷 镀钛 热力学 X射线光电子能谱 |
THERMODYNAMIC STUDY ON INTERFACE REACTION Of Ti/AlN |
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| Wu Hua, Sheng Dianhong.THERMODYNAMIC STUDY ON INTERFACE REACTION Of Ti/AlN[J].JOurnal of Vacuum Science and Technology,1995(3). |
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| Authors: | Wu Hua Sheng Dianhong |
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| Abstract: | The thermodynamics of interface reaction of AIN ceramics and plated titanium under normal temperature and ultra-high vacuum is studied. They are tested and verified using X-ray photocmission spec- troscopy(XPS). The results show that surface AIN ceramics is oxidized in air be fore plating titanium. After metallic titanium is plated on AIN ceramics,the first plated titanium is in the state of oxide. With the increa-sing of plated titanium,the contents of TiN and Al2O3 on the surface increase. |
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| Keywords: | AlN Plating titanium Thermodynamics XPS |
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