| Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled PlasmaTreatment简 |
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| 引用本文： | 李泽斌,吴忠航,居家奇,何孔多,陈枕流,杨曦露,颜航,区琼荣,梁荣庆. Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled PlasmaTreatment简[J]. 等离子体科学和技术, 2014, 0(1): 79-82 |
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| 作者姓名： | 李泽斌 吴忠航 居家奇 何孔多 陈枕流 杨曦露 颜航 区琼荣 梁荣庆 |
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| 基金项目： | supported by National Natural Science Foundation of China （Nos. 11005021, 51177017 and 11175049）, the Fudan University Excellent Doctoral Research Program （985 Project） and the Ph.D Programs Foundation of Ministry of Education of China （No. 20120071110031） |
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| 摘 要： | Al-doped zinc-oxide （AZO） thin films treated by oxygen and chlorine inductively coupled plasma （ICP） were compared. Kelvin probe （KP） and X-ray photoelectron spectroscopy （XPS） were employed to characterize the effect of treatment. The results of KP measurement show that the surface work function of AZO thin films can increase up to 5.92 eV after oxygen ICP （O-ICP）＇s treatment, which means that the work function was increased by at least 1.1 eV. However, after the treatment of chlorine ICP （CI-ICP）, the work function increased to 5.44 eV, and the increment was 0.6 eV. And 10 days later, the work function increment was still 0.4 eV after O-ICP＇s treatment, while the work function after Cl-ICP＇s treatment came back to the original value only after 48 hours. The XPS results suggested that the O-ICP treatment was more effective than CI-ICP for enhancing the work function of AZO films, which is well consistent with KP results.
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| 关 键 词： | 电感耦合等离子体 氧化物薄膜 功函数 氧化锌 铝掺杂 治疗 X射线光电子能谱 AZO薄膜 |
Enhanced Work Function of A1-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment |
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| Affiliation: | [1]Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, China [2]Engineering Research Center of Advanced Lighting Technology, Ministry of Education, Shanghai 200433, China |
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| Abstract: | oxygen inductively coupled plasma, Al-doped zinc-oxide （AZO）, work function |
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| Keywords: | oxygen inductively coupled plasma Al-doped zinc-oxide （AZO） work function |
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