| VERTICAL NONCONTACT POSITIONING H∞ ROBUST CONTROL FOR MAGNETICALLY LEVITATED SURFACE MOTOR |
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| 作者单位： | TAO Tao（School of Mechanical Engineering, Xi'an Jiaotog University, Xi'an 710049, China） ;
HAO Xiaohong（School of Mechanical Engineering, Xi'an Jiaotog University, Xi'an 710049, China） ;
MEI Xuesong（School of Mechanical Engineering, Xi'an Jiaotog University, Xi'an 710049, China;State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China） ;
JIANG Gedong（School of Mechanical Engineering, Xi'an Jiaotog University, Xi'an 710049, China） ;
ZHANG Dongsheng（School of Mechanical Engineering, Xi'an Jiaotog University, Xi'an 710049, China） ; |
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| 基金项目： | This project is supported by National Natural Science Foundation of China (No. 50475091, No. 50505035, No. 50575176), National Basic Research Program of China (973 Program, No. 2005CB724106) and New Century Excellent Person Support Plan of Ministry of Education of China (No. NCET-04-0935). |
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| 摘 要： | To fulfill the stringent requirement, super-precision positioning and ultra cleanness, a surface motor with the integrated chip fabrication equipment is constructed by using permanent magnets and electromagnet coils as primary actuating components. It consists of stator and mover, and the mover is isolated from the stator by the magnetic beating. The magnetic bearing in the stator is composed of eight air core electromagnet coils, the propulsion in the stator is composed of iron core and electromagnetic coils, and the mover is composed of NdFeB permanent magnets and levitated stage. Based on Lorentz law, some parameters, including permanent magnets dimensions, currents and levitation height, which may affect the stability, are analyzed and optimized. To improve the positioning accuracy in the vertical direction of the magnetic levitation surface motor, a robust controller is proposed using H∞ mixed sensitivity control theory. The simulation results show that by choosing appropriate weight functions, the controller can ensure the robustness of the closed loop system under the presence of uncertainties, and the H∞ robust controller is excellent for reducing steady error and increasing response speed.
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| 关 键 词： | 磁性飘浮 表面电动机 高精密度定位 控制系统 |
VERTICAL NONCONTACT POSITIONING H∞ ROBUST CONTROL FOR MAGNETICALLY LEVITATED SURFACE MOTOR |
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| Authors: | TAO Tao HAO Xiaohong MEI Xuesong JIANG Gedong ZHANG Dongsheng |
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| Abstract: | Magnetic levitation Surface motor Ultra-precision positioning Robust control |
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| Keywords: | Magnetic levitation Surface motor Ultra-precision positioning Robust control |
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