高加速度运动和精确定位臂的振动主动控制

刚／柔耦合结构的高加速度运动和精确定位一直是航空航天机构、精密设备和机器人等高尖端技术领域的关键功能要求。文中以微电子和半导体制造领域中的高速精准运动臂为研究对象，首先回顾相关的结构动力学研究成果，从而对系统动力学特性进行系统总结；在此基础上，重点对振动主动控制方法进行分析和讨论。最后结合实际工程背景，提出目前尚需解决的关键问题以及相应的解决问题的新思路，从而为进一步的研究进展或突破提供可能。

ACTIVE VIBRATION CONTROL FOR ARM STRUCTURE UNDERGOING HIGH ACCELERATION MOTION AND PRECISION POSITIONING

The high acceleration motion and precision positioning of rigid/flexible motion coupled structure is the key functional requirement for space structure, precision instrument and robot, which characterized in high technology and science fields. With the rapidly development of information technology(IT), the high acceleration motion and precision positioning also became the core technique issue in microelectronic and semiconductor manufacturing.The high speed motion/precision positioning arm structure in microelectronic and semiconductor manufacturing is investigated, first reviews and summarizes the related rigid/flexible coupled dynamics accomplishments, then classifies and analyzes the active vibration control methods used hitherto, at last, presents the pending problems and corresponding solutions or ideas by close associating practical engineering background to make further development or breakthrough.