| 纳米加工技术的研究进展 |
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| 引用本文： | 张文毓,侯世忠. 纳米加工技术的研究进展[J]. 纳米科技, 2011, 0(4): 68-71 |
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| 作者姓名： | 张文毓 侯世忠 |
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| 作者单位： | 洛阳船舶材料研究所,河南洛阳471039 |
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| 摘 要： | 纳米技术的核心是纳米加工技术。文章阐述了纳米加工技术的研究现状、应用和前景展望。希望对纳米加工技术有所了解。
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| 关 键 词： | 纳米加工技术 SPM 电子束光刻 微纳米加工 |
Advances in Nano-machining Technology |
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| ZHANG Wen-yu,HOU Shi-zhong. Advances in Nano-machining Technology[J]. , 2011, 0(4): 68-71 |
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| Authors: | ZHANG Wen-yu HOU Shi-zhong |
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| Affiliation: | (Luoyang Ship Material Research Institute,Luoyang 471039,China) |
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| Abstract: | Nanofabrication technology is key nanotechnology.In the paper,thestatus application and prospect of nanometer process technology research are introduced in details.Through this paper we get a quite comprehensive understanding to nanofabrication technology. |
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| Keywords: | nano-machining technology SPM electron-beam-photoetching Micro-nano-machining |
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