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Low ohmic contact AIN/GaN HEMTs grown by MOCVD |
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| Authors: | Gu Guodong Dun Shaobo Lv Yuanjie Han Tingting Xu Peng Yin Jiayun Feng Zhihong |
| Affiliation: | Science and Technology on ASIC Laboratory, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China |
| Abstract: | AIN/GaN HEMT ohmic contact SiC substrate MOCVD |
| Keywords: | AIN/GaN HEMT ohmic contact SiC substrate MOCVD |
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