两种薄层电阻测试系统探针游移误差的对比分析

从理论上分析方形四探针和直线四探针薄层电阻测试方法中探针游移所造成的系统偏差，推导出计算游移偏差的公式，并作图展示探针游移后的电阻与理想值之比的分布情况，分析了两种四探针测试方法出现最大误差的情况。用方形四探针测试方法不仅比普通直线四探针测试方法所测量的微区小，而且方形四探针测量的游移偏差小于直线四探针测量所产生的偏差。经试验发现，实际测试过程中，方形四探针只要在合理压力范围内，探针游移完全在合理范围内，能够保证测试的准确性。

The Contrasting and Analyzing of Probe Movement Error about Two Kinds of Measurement System of Sheet Resistance

The system errors caused by the micro-slipping in the movement of square sharp probes or four probs set in a line are analyzed. An equation for calculating the movement error is derived. And the distribution of ideal value of re-sistence versus the resistence value after the trial of the probe movement is shown with drawing. Two bad ways leading to movement errors are found. Square shape probes can measure smaller microarea and more veracity than the four probes set in a line. The results are substantiated by the trail of the movement of the probes in the interesting area through many experiments .