| 高精度大口径光栅拼接装置的控制算法 |
| |
| 引用本文： | 邵忠喜,张庆春,白清顺,富宏亚.高精度大口径光栅拼接装置的控制算法[J].光学精密工程,2009,17(1). |
| |
| 作者姓名： | 邵忠喜 张庆春 白清顺 富宏亚 |
| |
| 作者单位： | 哈尔滨工业大学,机电学院,黑龙江,哈尔滨,150001 |
| |
| 摘 要： | 采用宏/微结合双驱动的少自由度并联进给结构,给出了一种光栅拼接装置设计算法.宏动部分是5PTS-1PPS型并联机构,采用步进电机驱动滚珠丝杠形式的进给机构;微动部分是5TSP-1PPS型并联机构,采用压电陶瓷驱动柔性铰链形式的进给机构;二者串联构成光栅拼接机构.计算了宏动部分和微动部分的并联机构自由度,利用并联机构运动学的逆解推导出该装置的控制算法,并根据控制算法进行了宏动、微动机构点位控制的运动学仿真.为了提高机构的定位精度,分析了机构的系统误差并提出了误差修正方法.最后,将以上算法应用到光栅拼接装置中.实验结果表明:宏动部分最大移动定位误差为3.6 μm,最大转动定位误差为4.4 μrad;微动部分最大移动定位误差为0.06 μm,最大转动定位误差为1.2 μrad;基本满足光栅拼接系统的精度要求.
|
| 关 键 词： | 光栅拼接 运动学逆解 并联机构 自由度分析 |
Design method of controlling device for tiling high pecision and large aperture grating |
| |
| SHAO Zhong-xi,ZHANG Qing-chun,BAI Qing-shun,FU Hong-ya.Design method of controlling device for tiling high pecision and large aperture grating[J].Optics and Precision Engineering,2009,17(1). |
| |
| Authors: | SHAO Zhong-xi ZHANG Qing-chun BAI Qing-shun FU Hong-ya |
| |
| Affiliation: | School of Mechanical Engineering;Harbin Institute of Technology;Harbin 150001;China |
| |
| Abstract: | A mechanical grating tiling device is designed by a macro-micro dual-drive parallel mechanism with a few Degrees of Freedom(DOF).The raster matching device is composed of a macro-moving part using a step-motor controlled ballscrew unit(a 5PTS-1PPS parallel mechanism)and a micro-moving part using a piezoelectric ceramics controlled flexure hinge(a 5TSP-1PPS parallel mechanism) in series.The DOFs for the macro-moving part and the micro-moving part have been calculated and the control algorithms are deduced th... |
| |
| Keywords: | |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
