| 基于微流量热导传感器的氢气浓度检测系统研究 |
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| 引用本文： | 孙冬梅,刘林,徐海滨.基于微流量热导传感器的氢气浓度检测系统研究[J].控制工程,2011,18(4):505-508,617. |
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| 作者姓名： | 孙冬梅 刘林 徐海滨 |
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| 作者单位： | 南京工业大学自动化与电气工程学院,江苏南京,210009 |
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| 基金项目： | 江苏省高校自然科学研究项目资助(10KJB460004) |
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| 摘 要： | 对氢气分析仪器中的核心传感器进行研究,采用基于MEMS工艺的微型热导传感器,代替现有分析仪器常用热导池检测器,设计了氢气浓度检测系统机械结构；设计信号调理电路,并在传感器外部设计环境温度控制电路,以实现传感器的恒温检测.传感器输出的微弱信号经测量电桥调理输出,通过集成运算放大器加法、放大运算,最后把标准电压信号送入单片...
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| 关 键 词： | 热导传感器 检测系统 温度控制 |
Hydrogen Concentration Test Systems based on Thermal Conductivity Sensor |
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| SUN Dong-mei,LIU lin,XV Hai-bin.Hydrogen Concentration Test Systems based on Thermal Conductivity Sensor[J].Control Engineering of China,2011,18(4):505-508,617. |
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| Authors: | SUN Dong-mei LIU lin XV Hai-bin |
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| Affiliation: | SUN Dong-mei,LIU lin,XV Hai-bin(School of Automation & Electrical Engineering,Nanjing University of Technology,Nanjing 210009,China) |
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| Abstract: | The core sensor of hydrogen analysis instrument is studied.The mechanical struture of hydrogen concentration test system is designed by using MEMS based micro-flow gas thermal conductivity sensor.The signal conditioning circuit and the environment temperature control circuit in the external of the sensor are designed,in order to achieve constant temperature of the test sensor.The weak output signal of sensor is sended out through the measuring bridge,amplificated by the added circuit.The standard voltage si... |
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| Keywords: | thermal conductivity sensor test system temperature control |
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