| Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells |
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| 作者姓名： | 欧阳亮 刘万东 白小燕 陈志鹏 王慧慧 李弘 罗辰 吉亮亮 胡北 |
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| 作者单位： | CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics,University of Science and Technology of China, Hefei 230026, China |
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| 基金项目： | supported in part by National Natural Science Foundation of China （Nos. 10675121, 10333030） |
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| 摘 要： | The plasma density and electron temperature of a multi-source plasma system composed of several collisional inductively coupled plasma （ICP） cells were measured by a doubleprobe. The discharges of the ICP cells were shown to be independent of each other. Furthermore, the total plasma density at simultaneous multi-cell discharge was observed to be approximately equal to the summation of the plasma density when the cells discharge separately. Based on the linear summation phenomenon, it was shown that a larger area plasma with a uniform density and temperature profile could be constructed with multi-collisional ICP cells.
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| 关 键 词： | 诱导等离子体 碰撞 多源 等离子细胞 |
| 修稿时间： | 2006-04-10 |
Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells |
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| OUYANG Liang, LIU Wandong, BAI Xiaoyan, CHEN Zhipeng, WANG Huihui, LI Hong, LUO Chen, JI Liangliang, HU Bei.Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells[J].Plasma Science & Technology,2007,9(3):265-268. |
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| Authors: | OUYANG Liang LIU Wandong BAI Xiaoyan CHEN Zhipeng WANG Huihui LI Hong LUO Chen JI Liangliang HU Bei |
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| Affiliation: | CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics University of Science and Technology of China, Hefei 230026, China |
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| Abstract: | |
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| Keywords: | inductively coupled plasma collisional multi-source plasma cell |
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