| 挠性摆式微硅加速度计的有限元分析 |
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| 引用本文： | 董景新,赵长德.挠性摆式微硅加速度计的有限元分析[J].仪表技术与传感器,1999(2):1-3. |
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| 作者姓名： | 董景新 赵长德 |
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| 作者单位： | 清华大学精密仪器系 |
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| 摘 要： | 】微硅加速度计是近年来发展起来的新型器件，在结构设计阶段必须对其进行力学分析，以期对使用条件下的摆片位移、应力等作到心中有数。本文采用有限元分析方法对挠性摆式微硅加速度计进行有限元分析，其中包括对未封装及封装后实体单元进行敏感轴位移、侧向位移、横向灵敏度、受力情况等分析。分析结果表明所设计的微硅加速度计符合仪表性能要求。
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| 关 键 词： | 挠性摆式 微型加速度计 有限元分析 |
The Finite Element Method on Micromechanical Flexure Pendulous Silicon Accelerometer |
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| Dong Jingxin,Zhao Changde,Zhang Ziran,Pi Shun,Wu Xiaochun,Yuan Guang Tsinghua University,Beijing.The Finite Element Method on Micromechanical Flexure Pendulous Silicon Accelerometer[J].Instrument Technique and Sensor,1999(2):1-3. |
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| Authors: | Dong Jingxin Zhao Changde Zhang Ziran Pi Shun Wu Xiaochun Yuan Guang Tsinghua University Beijing |
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| Affiliation: | Dong Jingxin,Zhao Changde,Zhang Ziran,Pi Shun,Wu Xiaochun,Yuan Guang Tsinghua University,Beijing 100084 |
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| Abstract: | Micromechanical silicon accelerometer is developed recently.We must study micro structure and mechanical characteristics of a micromechanical accelerometer in design stage.ln this paper,we analyzed the mechanical characteristics of a micromechanical flexure pendulous silicon accelerometer with the method of finite element analysis.It included the displacement along sensing axis,the displacement along cross axis,cross axis sensitivity,stress and strain,etc.The analyses result is satisfied. |
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| Keywords: | Flexure Pendulum Micromechanical Accelerometer Finite Element Analysis |
| 本文献已被 CNKI 维普 等数据库收录！ |
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