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| (FeCo/CoNbZr)n多层软磁薄膜的结构与磁性能 | |
| 引用本文： | 曾孝勤,蒋向东,胡琳,张怀武. (FeCo/CoNbZr)n多层软磁薄膜的结构与磁性能[J]. 磁性材料及器件, 2006, 37(6): 36-38 |
| 作者姓名： | 曾孝勤 蒋向东 胡琳 张怀武 |
| 作者单位： | 电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054 |
| 摘 要： | 利用磁控溅射制备纳米晶单轴各向异性(FeCo/CoNbZr)n多层软磁薄膜,通过CoNbZr层的加入来细化FeCo颗粒。这种组合而成的多层膜矫顽力低,单轴各向异性明显,各向异性等效场Hk高,热稳定性优良,非常适合应用于超高密度磁记录头。 |
| 关 键 词： | (FeCo/CoNbZr)n纳米晶 多层软磁薄膜 磁控溅射 磁性能 微结构 |
| 文章编号： | 1001-3830(2006)06-0036-03 |
| 收稿时间： | 2005-12-12 |
| 修稿时间： | 2006-09-18 |
Microstructure and Magnetic Properties of (FeCo/CoNbZr)n Soft Magnetic Multilayer Films |
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| ZENG Xiao-qin,JIANG Xiang-dong,HU Lin,ZHANG Huai-wu. Microstructure and Magnetic Properties of (FeCo/CoNbZr)n Soft Magnetic Multilayer Films[J]. Journal of Magnetic Materials and Devices, 2006, 37(6): 36-38 | |
| Authors: | ZENG Xiao-qin JIANG Xiang-dong HU Lin ZHANG Huai-wu |
| Affiliation: | School of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China |
| Abstract: | Nanocrystalline(FeCo/CoNbZr)n uniaxial-anisotropy soft magnetic multilayers were prepared by magnetron sputtering.CoNbZr amorphous layers act as grain refiners as well as soft magnetic grain-boundary materials for the FeCo layers.The resultant multilayer films exhibit excellent uniaxial-anisotropy soft magnetic properties with low coercivity and high anisotropy field Hk,which are very attractive for applications in thin-film heads for ultrahigh-density magnetic recording. |
| Keywords: | (FeCo/CoNbZr)n nanocrystalline soft magnetic multilayer film magnetron sputtering magnetic property microstructure |
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