十字叠层压电定子双面驱动的平面电机

旨在提升电机性能及推动电机微型化发展，提出了一种新型十字叠层压电定子双面驱动的平面电机，利用面外、面内弯振耦合形成的椭圆轨迹推动动子精密移动；首先探讨了质点椭圆运动轨迹的形成条件并论述了电机的运行机理；然后基于灵敏度分析确定结构参数优化变量并对定子进行优化，简并了工作模态频率且使其分别为43252Hz、43258Hz、43289Hz；最后利用Ansys对定子进行仿真计算，验证了定子设计的合理性和可行性，且仿真表明在激励电压为250V、频率43300Hz时，定子驱动足各向最大振动位移均达到了1.5μm，动子的运动速度达到了46mm/s。

Plane motor driven by two sides of cross laminated piezoelectric vibrator

In order to improve the performance of the motor and promote the development of microminiaturization of the motor, a new type of planar motor driven by two-sided cross laminated piezoelectric stator is proposed, which uses the elliptical trajectory formed by the coupling of out of plane and in-plane bending vibration to drive the precise movement of the motor. Firstly, the formation conditions of particle ellipse trajectory are discussed, and the operation mechanism of the motor is discussed; Then, based on the sensitivity analysis, the structural parameter optimization variables are determined and the stator is optimized, and the operating mode frequencies are reduced to 43252Hz, 43258Hz and 43289Hz respectively; Finally, the rationality and feasibility of the stator design are verified by using ANSYS. The simulation results show that when the excitation voltage is 250V and the frequency is 43300Hz, the maximum vibration displacement of the stator driving foot in each direction reaches 1.5μm, and the moving speed of the stator reaches 46mm/s.