| 集成电路生产中废气的污染及治理 |
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| 引用本文： | 秦学礼.集成电路生产中废气的污染及治理[J].洁净与空调技术,2006(1):19-22. |
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| 作者姓名： | 秦学礼 |
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| 作者单位： | 中国电子工程设计院 |
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| 摘 要： | 介绍集成电路生产中产生各种废气的种类,废气中有害物质浓度及其危害性,并依据工程实践,评述了各类有害废气的各种处理方法。
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| 关 键 词： | 集成电路 有毒有害废气 废气处理 |
| 收稿时间： | 2005-12-06 |
| 修稿时间： | 2005年12月6日 |
Pollution and Treatment of Waste Gas Generated During IC Production |
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| QIN Xueli.Pollution and Treatment of Waste Gas Generated During IC Production[J].Contamination Control & Air-Conditioning Technology,2006(1):19-22. |
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| Authors: | QIN Xueli |
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| Affiliation: | QIN Xueli China Electronics Enginerning Design Institute |
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| Abstract: | Introduces the composition, concentration and risk of waste gas generated during IC poduction, The methods of waste gas treatment are evaluated based on practical projects. |
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| Keywords: | IC Hazard and toxic gas Waste gas treatment |
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