| Affiliation: | 1. Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, Rosenberg Str. 6, 09126 Chemnitz, Germany;2. Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, Rosenberg Str. 6, 09126 Chemnitz, Germany Materials and Reliability of Microsystems, Chemnitz University of Technology, Reichenhainer Straße 70, 09107 Chemnitz, Germany;3. Institute for Integrative Nanosciences, Leibniz IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany |
