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Observation of kinoform-style multilayer Fresnel zone plate by scanning ion microscopy |
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| Authors: | Masato Yasumoto Shigeharu Tamura Nagao Kamijo Kentaro Uesugi Yoshio Suzuki |
| Affiliation: | a National Institute of Advanced Industrial Science and Technology (AIST), AIST Tsukuba Central-2, Umezono, Tsukuba 305-8568, Japan b National Institute of Advanced Industrial Science and Technology (AIST), AIST Kansai, Midorigaoka, Ikeda 563-8577, Japan c Kansai Medical University, Uyama-Higashi, Hirakata 573-1136, Japan d Japan Synchrotron Radiation Research Institute (JASRI), Kouto, Sayo-cho, Hyogo 679-5198, Japan |
| Abstract: | We investigated a kinoform-style Fresnel zone plate (FZP) that is a high-efficient optical element for hard X-ray focusing. The Cu/Al kinoform-style FZPs were fabricated with a sputtered-sliced method. The FZP was composed of 450 layers (30 layers, 15 pairs) of Al, Cu/Al composite, and Cu. The microstructure of the Cu/Al composite layer was observed by scanning ion microscopy based on a focused ion beam (FIB). In the Cu/Al composite layer, the SIM images obtained by grain orientation contrast observation indicated that the Cu grains were grown gradually with increasing Cu concentration. |
| Keywords: | Fresnel zone plate Multilayer Thin film Hard X-ray Optical element Grain |
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