| 新型二维压电光学扫描器 |
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| 引用本文： | 袁松梅,林继杰,庄驰,刘强.新型二维压电光学扫描器[J].压电与声光,2007,29(4):411-413. |
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| 作者姓名： | 袁松梅 林继杰 庄驰 刘强 |
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| 作者单位： | 北京航空航天大学,机械工程及自动化学院,北京,100083 |
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| 基金项目： | 教育部留学回国人员科研启动基金;北京市教委重点学科建设项目 |
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| 摘 要： | 介绍了一种新型二维压电光学扫描器的制备和工作原理,并利用有限元模型对二维压电光学扫描器作了振动模态的分析,最后采用激光多普勒干涉仪测量了二维压电光学扫描器的扫描频率和振动特性。实验表明,二维压电光学扫描器仅用2个双压电晶片驱动反射镜实现二维图像扫描,其器件加工简单,结构设计合理,同时适用于驱动器领域,实现二维驱动。
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| 关 键 词： | 二维压电光学扫描器 激光多普勒干涉仪 振动模态 有限元分析 |
| 文章编号： | 1004-2474（2007）04-0411-03 |
| 修稿时间： | 2006-06-19 |
A New Planar Piezoelectric Optical Scanner |
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| YUAN Song-mei,LIN Ji-jie,ZHUANG Chi,LIU Qiang.A New Planar Piezoelectric Optical Scanner[J].Piezoelectrics & Acoustooptics,2007,29(4):411-413. |
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| Authors: | YUAN Song-mei LIN Ji-jie ZHUANG Chi LIU Qiang |
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| Abstract: | This paper described the fabrication and the principle of a new planar piezoelectric optical scanner(PPOS),and finite element analysis(FEA) was used to study the vibration modes of PPOS.Eventually,a laser doppler interferometer was adopted to measure the scan frequency and the vibration characteristic of PPOS.It shows in the results that PPOS was capable of scanning planar images with only two piezoelectric wafers actuating the speculum,and PPOS can also be used in actuating field to realize planar actuating with the characteristic of easy fabrication and good design. |
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| Keywords: | planar piezoelectric optical scanner(PPOS) laser doppler interferometer vibration modes finite element analysis(FEA) |
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