Affiliation: | a Patterning Group, Manufacturing Technology Center, Samsung Electronics Co. Ltd., 416 Maetan-3 Dong, Yeongtong-Gu, Suwon, Gyeonggi-Do 443-742, South Korea b Solar Energy Business Team, Samsung Electronics Co. Ltd., San 24 Nongseo-Dong, Kiheung-Gu, Yongin, Gyeonggi-Do 449-711, South Korea |