Tonpilz型压电陶瓷超声传感器的设计

超声传感器是一种电声转换器件,其敏感元件压电陶瓷控制传感器的主要性能。设计了一种谐振频率为140 kHz的Tonpilz型压电陶瓷超声传感器,从压电方程入手,建立了不同的理论模型,对等效网络法和有限元法2种不同的设计方法进行了比较。相应的试验表明:有限元法的分析结果直观明了、建模快捷、分析准确,其误差可控制在5%以内。设计研制的Tonpilz型传感器工艺简单、造价低廉、性能稳定。

Design of Tonpilz type piezoelectric ceramic ultrasonic transducer

The ultrasonic transducer is an electroacoustic device.Its performance is determined mainly by the properties of its sensitive element,namely piezoelectric ceramics.A 140 kHz Tonpilz piezoelectric ceramic ultrasonic transducer is investigated.Derived from the piezoelectric constitutive equation,the equivalent circuit model and finite element model are constructed respectively.The difference between above two models is described.A comparison shows that the method of FEA has a good accuracy,and its analysis error can be controlled within 5 %.So FEA is suitable for such type piezoelectric transducer.Some transducer prototypes are made according to the design result.The corresponding test shows a good performance.