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Microstructure,Hardness and Corrosion Resistance of ZrN Films Prepared by Inductively Coupled Plasma Enhanced RF Magnetron Sputtering |
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| Authors: | LIU Feng MENG Yuedong REN Zhaoxing SHU Xingsheng |
| Affiliation: | Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031. China |
| Abstract: | inductively coupled plasma （ICP）, magnetron sputtering, zirconium nitride,nficrostructure, nano-hardness, corrosion resistance |
| Keywords: | inductively coupled plasma （ICP） magnetron sputtering zirconium nitride nficrostructure nano-hardness corrosion resistance |
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