| 基于微型光机电系统扫描镜技术的激光散斑抑制方法 |
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| 引用本文： | 唐国先,石云波,刘俊,赵幸娟,柴鹏兰,王瑞荣.基于微型光机电系统扫描镜技术的激光散斑抑制方法[J].激光与光电子学进展,2011(6). |
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| 作者姓名： | 唐国先 石云波 刘俊 赵幸娟 柴鹏兰 王瑞荣 |
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| 作者单位： | 中北大学仪器科学与动态测试教育部重点实验室电子测试技术重点实验室; |
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| 基金项目： | 国家自然科学基金(61078036)资助课题 |
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| 摘 要： | 激光固有的时间和空间相干性,造成的散斑现象成为实现激光显示技术的瓶颈。针对激光显示的消散斑问题,提出了一种基于微型光机电系统(MOEMS)扫描镜技术的散斑抑制方法,并设计了一种简单的二维扫描镜结构,为开发非运动式、小体积、低功耗、高速低成本电调制的MOEMS,实现对激光散斑的抑制,标准化消相干器件的工艺的开发和规模化生产技术提供了参考。
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| 关 键 词： | 激光 显示技术 散斑抑制 微型光机电系统扫描镜 消相干 |
Speckle Reduction Based on MOEMS-Scanning Mirror Techonology |
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| Tang Guoxian Shi Yunbo Liu Jun Zhao Xingjuan Chai Penglan Wang Ruirong.Speckle Reduction Based on MOEMS-Scanning Mirror Techonology[J].Laser & Optoelectronics Progress,2011(6). |
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| Authors: | Tang Guoxian Shi Yunbo Liu Jun Zhao Xingjuan Chai Penglan Wang Ruirong |
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| Affiliation: | Tang Guoxian Shi Yunbo Liu Jun Zhao Xingjuan Chai Penglan Wang Ruirong(Key Laboratory of Instrument Science and Dynamic Measurement,Ministry of Education,Science andTechnology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan,Shanxi 030051,China) |
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| Abstract: | The temporal coherence and spatial coherence of laser are the bottleneck of the laser display technology.To solve the speckle suppression problem,a speckle suppression method based on micro-opto-electro-mechanical system(MOEMS) scanning mirror technology is proposed.Meanwhile a simple structure of the two-dimensional micro-mirror,which will provide some references for the research of static,small size,low power consumption,high speed and low cost laser speckle suppression methods is proposed. |
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| Keywords: | lasers display technology speckle reduction micro-opto-electro-mechanical system scanning mirror decoherence |
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