|
|||||
|
|
Parametric study of the electrical to thermal power conversion in an inductively coupledrf plasma torch |
|
| Authors: | J R Pai N Venkataramani V K Rohatgi |
| Affiliation: | (1) Plasma Physics Division, Bhabha Atomic Research Centre, 400 085 Trombay, Bombay, India |
| Abstract: | An inductively coupled (ic) radio-frequency (rf) stabilized argon plasma was generated in a quartz tube using a 7 MHzrf generator. The electrical and thermal powers were measured and the efficiency of energy conversion was computed. The results indicate that for a constant power input, there is an optimum argon flow rate for which maximum energy conversion efficiency occurs. |
| Keywords: | ic plasma torch" target="_blank">ic plasma torch efficiency argon plasma temperature skin depth rf plasma" target="_blank">rf plasma |
| 本文献已被 SpringerLink 等数据库收录！ | |