| 误差综合测量的数字化码检仪 |
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| 引用本文： | 余光清,刘恩海,郝永杰. 误差综合测量的数字化码检仪[J]. 光电工程, 2002, 29(6): 28-30,34 |
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| 作者姓名： | 余光清 刘恩海 郝永杰 |
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| 作者单位： | 中国科学院光电技术研究所,四川,成都,610209;中国科学院光电技术研究所,四川,成都,610209;中国科学院光电技术研究所,四川,成都,610209 |
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| 摘 要： | 介绍了码检仪采用模拟量测量方式的原理、组成及存在的问题;提出了码检仪的数字化途径,原理和所有光栅检测参数的数字化测量,并对数字化测量进行了误差分析。通过对两种测量方式的比较,对数字化测量存在的问题提出了解决办法。
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| 关 键 词： | 码检仪 数字化测量 误差测量 光栅检验 |
| 文章编号： | 1003-501X(2002)06-0028-03 |
| 收稿时间： | 2001-12-28 |
A digital encoder tester for comprehensive error measurement |
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| YU Guang-qing,LIU En-hai,HAO Yong-jie. A digital encoder tester for comprehensive error measurement[J]. Opto-Electronic Engineering, 2002, 29(6): 28-30,34 |
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| Authors: | YU Guang-qing LIU En-hai HAO Yong-jie |
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| Abstract: | The principle and constitution and the existed problems of analog measurement mode used in the encoder tester are presented. Digitization approach, principle of an encoder tester and the digital measurement for grating detection parameters are proposed. The error analysis for digital measurement is carried out. The solving methods for the problems existed in digital measurement are proposed through comparing two measurement modes. |
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| Keywords: | Code disk tester Digital measurement Error analysis Grating testing |
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