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碳纳米薄膜材料的研究进展
引用本文:关磊.碳纳米薄膜材料的研究进展[J].微纳电子技术,2012(8):522-525,552.
作者姓名:关磊
作者单位:辽宁石油化工大学化学与材料科学学院
摘    要:碳纳米薄膜是一种新型碳纳米材料,因其具有优良的物理和化学性能、很好地应用前景而受到了广泛关注。综述了无定形碳膜、石墨烯膜、类金刚石碳(DLC)膜、金刚石膜、CNx膜和碳纳米管(CNT)膜的制备方法和结构的研究进展,总结了其在不同领域的潜在应用价值。探讨了该研究领域亟待解决的问题以及今后的发展前景。今后一段时间内对碳纳米薄膜材料的制备和应用研究将会更加深入,研究应致力于碳纳米薄膜制备方法的简单化,寻求价格低廉的碳源,同时对应用开发还要有所拓展。

关 键 词:碳纳米材料  薄膜  二维  石墨烯膜  场发射

Research Progress in Nanomaterials of Carbon Thin Films
Guan Lei.Research Progress in Nanomaterials of Carbon Thin Films[J].Micronanoelectronic Technology,2012(8):522-525,552.
Authors:Guan Lei
Affiliation:Guan Lei (School of Chemistry and Materials Science,Liaoning University of Petroleum and Chemical Engineering,Fushun 113001,China)
Abstract:The carbon nano thin film is a novel carbon nanomaterial,which has excellent physical and chemical properties,shows a good prospect of applications,and attracts extensive attentions.The study progress in the preparation and structures of the carbon thin film,including the amorphous carbon film,grapheme film,diamond-like carbon(DLC) film,diamond film,CNx film,carbon nanotubes(CNTs) film are summarized.Besides that,the value in the potential application fields is also summarized.The problems to be solved and possible prospect of the development for the research fields are discussed.In the coming period,the study of the preparation and applications of the carbon nano thin film will be more in-depth.The research should be committed to simplify preparation methods,search for low-cost carbon sources,and expand the application fields of the carbon nano thin film.
Keywords:carbon nanomaterial  thin film  two-dimensional  graphene film  field emission
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