Thermal-sensitive BST thin film capacitors for dielectric bolometer prepared by RF magnetron sputtering |
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| Authors: | Shi-Jian Liu Xiang-Bin Zeng |
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| Affiliation: | a National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences,500 Yutian Road, Shanghai 200083, People's Republic of China
b Department of Electronics Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, People's Republic of China |
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| Abstract: | We have been developing a monolithic microbolometer technology for uncooled infrared focal plane arrays (Uncooled IRFPAs) along the route from fabricating pixels of thin-film dielectric bolometers on micromachined silicon substrates. In the paper, the thermal-sensitive barium strontium titanate (BST) thin film capacitors for that objective prepared by Radio-Frequency Magnetron sputtering have been investigated focusing on the condition of fabrication of BST thin films. Capacitor-Temperature properties of the thermal-sensitive BST thin film capacitors have been measured with impedance analyzer. According to the Capacitor-temperature curves, these indicated that the temperature coefficient of dielectric constant (TCD) within the ambient temperature region highly depended on the Radio-Frequency Magnetron sputtering condition of fabrication of BST thin films. BST thin film capacitors with TCD-value more than 21%/K have been prepared on the optimized condition. That is a good base for preparation of dielectric bolometer mode of uncooled IRFPAs. |
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| Keywords: | Thermal-sensitive BST thin film capacitors Temperature coefficient of dielectric constant Dielectric bolometer mode |
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