基于波长积分双色法的小视场快速温度场测量

激光退火技术有热预算低、瞬间温度高的特点，其温度场特性是材料电学性能的重要表征参数。准确实时测量瞬态小温度场对整体退火工艺过程的把控具有重要的参考价值。辐射测温法通过收集样品辐射光谱中特定波段的能量来实现温度的非接触在线测量，具有响应快、测温范围宽等特点。提出了一种基于InGaAs红外光电二极管的双色辐射测温系统设计方案，采用波长积分法对该测温系统进行精确标定，单波段带宽可达350 nm，能够对小于0.01 mm²的小视场进行稳定快速测量。去除标定热台稳定性后的测温重复性最大仅为0.05%oR（of reading，读数精度），精度小于1%，远超同类高温测量设备。在此基础上，结合有限元法热仿真结果，提出一种基于单个光电二极管测量温度场分布的方法，讨论了最高温度与读数温度之间的关系，为工艺参数评估提供了重要的数据支撑。

A rapid temperature field measurement study based on the integral dual-wavelength radiation thermometry

Laser annealing technology has the characteristics of low thermal energy and high temperature, and the temperature field feature is an important characterization parameter of the electrical properties of the material. An accurate, real-time measurement of the instantaneous state of the temperature field is of great value in the overall annealing process. The radiation thermometry is a non-contact online method that calculates the energy emitted by the sample of specific wavelength, providing a quick response and wide range. A dual-wavelength radiation thermometry system based on InGaAs infrared photodiode is presented. The system is calibrated by wavelength integral method so that the bandwidth of each channel can reach 350 nm and the system can meet quite small field measurement less than 0.1mm². The maximum repeatability is 0.05% regardless of the fluctuation in heating stage for calibration, and the precision is <1%, which are superior to other radiation thermometry equipment operating at such high frequency. Furthermore, the method that measures the temperature field distribution based on single photodiode instead of matrix CCD is also presented, which is based on the equivalent temperature measured by photodiode with the simulation result obtained by COMSOL. A linear relationship between the highest temperature and the reading temperature is discussed, which provides a significant numerical support for annealing process optimization.