准分子激光增强金属电化学刻蚀特性实验研究

采用248nm KrF准分子激光照射电化学刻蚀中的金属阳极,记录过程中阳极电流的变化,对不同金属的阳极电流 曲线进行对比分析,发现在激光作用的时间内,阳极电流显著增大,激光作用过后,阳极电流迅速减小,而且脉冲频率越高阳 极电流增加的幅度越大,不同的金属阳极电流曲线有所不同,这反映准分子激光对不同金属电化学特性的增强有所差别。

Experimental study on electrochemical characteristics of metal in excimer laser-enhanced processes

In this paper, the experiments of 248nm KrF excimer laser-enhanced electrochemical processes of metals are carried out The anode current curves are recorded and analysised. They show that the currents increase obviously during the laser running and decrease quickly without the laser. And the frequency of laser pulses is quicker, the magnitude of currents increase is bigger. The differences in the curves are also studied, they indicate that the electrochemical characteristics of different metals in excimer laser- enhanced processes are different.