主动式相移干涉测试技术及其应用

在相移干涉测试技术中，相移量误差会直接影响干涉测试的精度，特别是在有振动和空气扰动的环境下很难得到正确的相移量，因而对干涉仪的使用条件要求较高．本文提出了一种主动式相移干涉测试技术，它在较差使用条件下也能自动给出正确的相移量并在这一瞬间自动采集干涉图像，文中叙述了这一技术的原理、实验结果及其在电子散斑干涉技术中的应用．

Active phase-shifting interferometric measurement technique and its applications

In phase-shifting interferometric measurement techniques,the errors of phase-shift magnitude directly affect the accuracy of the test.Especially in vibration and air distur bance conditions,it is hard to get correct phase-shift magnitude so the conditions of using this interferometry are very severe.An active phase-shifting interferomatric technique is proposed in this paper,which can automatically give out the correct phase-shift magni tude in harsh conditions and automatically sampling the interferometric patterns in a flash.The principle of this technique,the experimental results and its applications in phase-shifting electronic speckle pattern interferometry are described in this peper.