|
|||||
|
|
| 光学和光电子系统用的微机械加工技术 | |
| 引用本文： | 李拴庆,周立军. 光学和光电子系统用的微机械加工技术[J]. 微纳电子技术, 1999, 0(4) |
| 作者姓名： | 李拴庆 周立军 |
| 作者单位： | 电子十三所!石家庄 050051 |
| 摘 要： | 回顾了微机械加工技术的最新进展， 介绍了自由空间微型光学试验平台和光预对准的概念以及微机械加工的光学器件实例。 |
| 关 键 词： | 集成光学 集成光电子学 微电子机械器件 光学开关 |
Micromachining Techniques for Optical and Optoelectronic Systems |
|
| Li Shuanqing,Zhou Lijun. Micromachining Techniques for Optical and Optoelectronic Systems[J]. Micronanoelectronic Technology, 1999, 0(4) | |
| Authors: | Li Shuanqing Zhou Lijun |
| Abstract: | The recent advances in micromachining techniques are reviewed in this paper.The free space microoptical bench and the concept of optical prealignment as well as micromachined optical devices are introduced. |
| Keywords: | Integrated optics Integrated optoelectronics Microelectromechanical device Optical switch |
| 本文献已被 CNKI 等数据库收录！ | |