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Synthesis of PbTiO3 film on LaNiO3-coated substrate by the spray-ICP technique
Authors:H. Ichinose  M. Nagano  H. Katsuki  H. Takagi
Affiliation:(1) Department of Applied Chemistry, Saga University, 1, Honjou-machi, 840 Saga-shi, Japan;(2) Saga Ceramics Research Laboratory, 3100-5, Arita-machi, Nishimatsuura-gun, 844 Saga, Japan
Abstract:In an attempt to utilize LaNiO3 as a bottom electrode for PbTiO3 ferroelectric film, PbTiO3 and LaNiO3 films were prepared by the spray-ICP technique under atmospheric pressure. The dense LaNiO3 films crystallized with preferred (1 1 1) and (1 0 0) orientations on sapphire (0 0 1) and MgO (1 0 0), respectively. Resistivities of the LaNiO3 films deposited above 600 °C were about 4 × 10–6 OHgrm. The PbTiO3 film with preferred (001) orientation was successfully prepared on LaNiO3-coated MgO (1 0 0). Its dielectric constant and dissipation factor were about 200 and 0.02, respectively, at 1 kHz. The Curie temperature suggested that PbTiO3 films were free from contamination by LaNiO3.
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