压电驱动膜片式微型气泵

提出一种结构新颖的压电驱动膜片式微型气泵，对其输出流量、膜片的振幅等参数进行了理论分析，在此基础上设计、制作了微型气泵样机，并进行了测试实验。这种气泵在结构上充分利用了双压电梁端部位移大的优点，并利用两根双压电梁将膜片悬起，增加了容积变化率和输出流量，并具有结构简单，功耗低，厚度小，无电磁噪音，可靠性高等优点，在微型电子器件的冷却、微型燃料电池换气等方面显示出良好的应用前景。根据实验，微型气泵的一阶固有频率约为120Hz，在谐振状态下，当驱动电压为50V时，其输出流量为192mL／min，功耗小于23mW。

A Diaphragm Micro Air Pump Actuated by Piezoelectric Element

In this paper, a novel diaphragm micro air pump actuated by piezoelectric element is presented. Some parameters of the air pump, such as flow rate, diaphragm's amplitude are analyzed. Based the analysis results, a prototype of the micro air pump is fabricated and measured. About pump's structural design, the feature that the displacement in the end of the bimorph is largest is fully availed of. The diaphragm is suspended by two bimorphs in the pump to increase greatly the volumetric ratio and flow rate. The air pump have advantages, such as simple structure, low power consumption, small thickness, no electromagnetic noise, high reliability and so on. The micro diaphragm air pump shows good application prospects in the fields of micro electronic devices' cooling and micro fuel cell's air supply. The experimental results demonstrate that the first order resonant frequency is about 120 Hz. When driving voltage is 50V, the air pump's flow rate is 192 ml/min at the state of resonating and its power consumption is less than 23 mW.