| Designing of Quasi—universal Compensator for Testing Aspherical Surface |
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| 作者姓名： | WANGWensheng XUBin |
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| 作者单位： | [1]ChangchunCollegeofOpticsandFineMechanics,Changchun130022,CHN [2]ChangchunCollegeofOpticsandFineMechanics,Changchun130022,CHN |
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| 摘 要： | According to the theory of testing aspherical surface by normal aberration compensation method,the designing method of quasi-universal compensator is studied.On the basis of third-order aberration theory,after calculating and optimizing with an optical design program,the structure parameters of a compensator are obtained.This new compensator could be used in Twyman-Green interferometer,and in measurement of a certain range of paraboloid ellipsoid and hyperboloid.The compensation accuracy is more than 0.02λ.
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| 关 键 词： | 准通用补偿器 非圆表面 光系统 当量像差补偿方法 图像处理 |
| 收稿时间： | 1997/11/18 |
Designing of Quasi-universal Compensator for Testing Aspherical Surface |
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| WANGWensheng XUBin.Designing of Quasi-universal Compensator for Testing Aspherical Surface[J].Semiconductor Photonics and Technology,1998,4(1):40-44,61. |
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| Authors: | WANG Wensheng XU Bin |
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| Abstract: | According to the theory of testing aspherical surface by normal aberration compensation method,the designing method of quasi-universal compensator is studied.On the basis of third-order aberration theory,after calculating and optimizing with an optical design program,the structure parameters of a compensator are obtained.This new compensator could be used in Twyman-Green interferometer,and in measurement of a certain range of paraboloid ellipsoid and hyperboloid.The compensation accuracy is more than 0.02λ. |
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| Keywords: | Aspherical Surface Normal Aberration Compensation Method Quasi-universal Compensator |
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