| 高提取效率表面织构红光发光二极管 |
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| 引用本文： | 李建军,宋小伟,蒋文静,沈光地. 高提取效率表面织构红光发光二极管[J]. 固体电子学研究与进展, 2009, 29(2) |
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| 作者姓名： | 李建军 宋小伟 蒋文静 沈光地 |
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| 作者单位： | 北京工业大学,北京光电子技术实验室,北京,100124 |
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| 基金项目： | 北京市教委资助项目，北京市属市管高等学校人才强教计划资助项目 |
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| 摘 要： | 给出了用蒙特卡罗射线追踪法模拟发光二极管(LED)光提取效率的过程,并对表面织构LED的光提取效率进行了模拟分析,得到存在一组优化的表面织构参数,可使LED的光提取效率提高36%。通过湿法腐蚀和干法刻蚀相结合工艺,制备了表面织构的红光LED,器件的轴向光强提高了20.6%。理论和实验结果,表明表面织构技术是提高LED光提取效率的一个主要途径。
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| 关 键 词： | 发光二极管 光提取效率 射线追踪法 表面织构 |
Surface Texture Red Light-emitting Diodes with High Extracting Efficiency |
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| LI Jianjun,SONG Xiaowei,JIANG Wenjing,SHEN Guangdi. Surface Texture Red Light-emitting Diodes with High Extracting Efficiency[J]. Research & Progress of Solid State Electronics, 2009, 29(2) |
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| Authors: | LI Jianjun SONG Xiaowei JIANG Wenjing SHEN Guangdi |
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| Abstract: | A Monte Carlo ray tracing method is provided to simulate the light extracting efficiency of the light-emitting diodes(LED).The simulation results for the surface texture LED show that a 36% increment of the extracting efficiency can be reached by optimizing the texture parameters.The surface texture LED is fabricated by wet and dry etching,a 20.6% increment of the axis light intensity is obtained for the surface texture LED.Both the theory and the experiment results show that the surface texture technology is an effective method to increase the LED light extracting efficiency. |
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| Keywords: | light-emitting diodes light extracting efficiency ray tracing method surface texture |
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