Rotary powder bed chemical vapour deposition of titanium nitride on spherical iron powder |
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Authors: | Hideaki Itoh Kenji Hattori Shigeharu Naka |
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Affiliation: | (1) Synthetic Crystal Research Laboratory, Faculty of Engineering, Nagoya University, Furo-cho, Chikusa-ku, 464 Nagoya, Japan |
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Abstract: | Titanium nitride (TiN) was coated on to spherical iron powder by the rotary powder bed chemical vapour deposition technique
using a reactant gas of the TiCl4-N2-H2 system. The dispersibility of the coated powder was significantly improved by the adsorption of the reactant gas on to the
rotating particles during raising the temperature. Polycrystalline TiN film, having a columnar structure of a few micrometres
was coated on to the iron powder, typically at a deposition temperature of 1000° C and at a treatment time of 80 min. The
TiN-coated iron powder showed an oxidation resistance up to about 650° C. |
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