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| 铁电材料激光刻蚀系统中的PID微机控制技术 | |
| 引用本文： | 夏丽昆,侯阳,李银柱,太云见,袁俊,莫启元.铁电材料激光刻蚀系统中的PID微机控制技术[J].红外技术,2006,28(8):489-492. |
| 作者姓名： | 夏丽昆 侯阳 李银柱 太云见 袁俊 莫启元 |
| 作者单位： | 1. 总装重庆军代局驻昆明地区军代室,云南,昆明,650223;昆明物理研究所,云南,昆明,650223;北京理工大学自动控制系,北京,100081 2. 昆明物理研究所,云南,昆明,650223 3. 总装重庆军代局驻昆明地区军代室,云南,昆明,650223 |
| 摘 要： | 国内外已研究的网格化技术包括离子束刻蚀和激光化学辅助刻蚀。由于铁电体材料不易减薄至20μm以下，而且像元中心距也在逐步减小，采用离子束刻蚀技术实施网格化很困难。因此，为实现热释电非制冷焦平面探测器的网格化，减小热串音，提高器件的空间分辨率，采用了一套基于PID微机控制技术的激光化学辅助刻蚀系统对铁电材料进行了网格化刻蚀，较好地解决了大列阵铁电材料探测器的网状技术这一难题。 |
| 关 键 词： | 铁电材料 激光刻蚀 PID控制技术 |
| 文章编号： | 1001-8891（2006）08-0489-04 |
| 收稿时间： | 2006-06-20 |
| 修稿时间： | 2006-06-20 |
PID Control Technology in the Laser Etching System for Ferroelectric Materials |
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| XIA Li-kun,HOU Yang,LI Yin-zhu,TAI Yun-jian,YAN jun,MO Qi-yuan.PID Control Technology in the Laser Etching System for Ferroelectric Materials[J].Infrared Technology,2006,28(8):489-492. | |
| Authors: | XIA Li-kun HOU Yang LI Yin-zhu TAI Yun-jian YAN jun MO Qi-yuan |
| Affiliation: | 1.The military deputation office of PLA stationed in Kunming, Kunming YunNan 650223, China; 2.Kunming Institute of Physics, Kunming Yunnan 650223, China; 3.Dept of Control Project, Beijing Institute of Technology, Beijing 100081, China |
| Abstract: | The developed gridding technology includes ion etching and laser assisted etching. The ion etching reticulation is very diffcult for ferroelectric materials due to thickness limitation as well as narrow distance between pixels. In order to minimize cross-talking and improve the resolution, a laser assisted etching system based on PID control technology was adopted for reticulation of ferroelectric wafers and it effectively solved the reticulation problem in large area ferroelectric wafers. |
| Keywords: | ferroelectric material laser etching PID control technology |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |