行星运动方式下不同形状磨头的去除函数

为了在光学元件的加工中获取更加接近高斯型的去除函数,本文基于传统行星运动抛光理论,提出了用自转去除函数公转轨迹积分较方便地求取各种复杂形状磨头去除函数的方法。当转速比大于10时,新方法与传统方法得到的实心圆盘去除函数曲线非常接近,从而验证了提出方法的正确性。采用新方法推导了不同形状磨头的去除函数,并通过计算机进行了仿真实验。实验显示:磨头形状为Ⅱ型花瓣,偏心率为0.4时,可以获得非常接近高斯型的去除函数。针对Ⅱ型花瓣磨头进行了抛光试验,结果表明,当偏心率为0.4、转速比为10时,试验结果与仿真结果非常吻合,且都非常接近高斯型去除函数。实验结果再次验证了新方法的正确性。

Removal functions of different polishing heads worked in planet motion model

To obtain Gaussian-like removal function in optical manufacturing process ,a convenient method to derive the removal functions of various complicated polishing heads by integrating the rota-tion removal function along the revolution trajectory was proposed based on the traditional planet poli-sing theory .When the speed ratio was greater than 10 ,the removal function curve of a solid disk by the proposed method was very close to the result by the traditional method ,which verifies the correct-ness of the proposed method .The proposed method was used to derive polishing removal functions of different polishing heads .By computer simulation ,it show s that type Ⅱ petal polishing head gets a better removal function curve w hen the eccentricity ratio is 0 .4 .Finally ,the type Ⅱ petal polishing head was polished ,and the results indicate that when the eccentricity ratio was 0 .4 and the speed ratio is 10 ,the test and simulation results are consistent with each other and they are all close to the Gaussi-an curve .These test result verifies the correctness of the proposed method again .