| XPS表征类金刚石膜探讨 |
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| 引用本文： | 覃礼钊,张旭,吴正龙.XPS表征类金刚石膜探讨[J].现代仪器,2005,11(6):18-20. |
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| 作者姓名： | 覃礼钊 张旭 吴正龙 |
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| 作者单位： | 1. 北京师范大学分析测试中心,北京,100875
2. 北京师范大学低能核物理研究所,北京,100875 |
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| 摘 要： | 介绍X射线光电子能谱(XPS)分析类金刚石(DLC)膜的原理与方法,探讨分峰拟合计算时参量设定对分析结果的影响,改进拟合方法,拟合结果更准确,结果的一致性好。
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| 关 键 词： | 类金刚石 sp3组分 sp2组分 XPS |
Discussion of diamond-like carbon films by XPS |
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| Qin Lizhao,Wu Zhenglong,Zhang Xu.Discussion of diamond-like carbon films by XPS[J].Modern Instruments,2005,11(6):18-20. |
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| Authors: | Qin Lizhao Wu Zhenglong Zhang Xu |
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| Affiliation: | 1. Analytical and Testing Center, Beijing Normal University 100875 ;2. Institute of Low Energy Nuclear Physics, Beijing Normal University 100875 |
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| Abstract: | The principles and methods of analyzing diamond-like carbon(DLC) films by the X-ray photoelectron spectroscopy(XPS) were introduced.The influence on curve fitting was discussed.We improved the curve fitting method with given difference between sp3 and sp2 position,and the fitting results were more accurate and more consistent. |
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| Keywords: | Diamond-like carbon film sp^3 component sp^2 component XPS |
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