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| 膜厚类测试仪器的比对 | |
| 引用本文： | 李锁印,李建强,魏玲,王亚军. 膜厚类测试仪器的比对[J]. 计算机与数字工程, 2010, 38(9): 49-51,76 |
| 作者姓名： | 李锁印 李建强 魏玲 王亚军 |
| 作者单位： | 1. 中国电子科技集团公司第十三研究所,石家庄,050051 2. 河南北方红阳工业集团公司区域计量站,洛阳,451450 3. 河北燕兴机械有限公司,张家口,075041 |
| 摘 要： | 文章介绍了膜厚类测试仪比对方法的设计、比对结果的处理及比对周期的选取等,给出了台阶仪和光谱型膜厚测量仪的实际结果。该方法也适用于其他仪器的比对,并给出了比对中应注意的问题。 |
| 关 键 词： | 比对 膜厚 标准 |
Comparison of Film Thickness Measuring Instrments |
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| Li Suoyin,Li Jianqiang,Wei Ling,Wang Yajun. Comparison of Film Thickness Measuring Instrments[J]. Computer and Digital Engineering, 2010, 38(9): 49-51,76 | |
| Authors: | Li Suoyin Li Jianqiang Wei Ling Wang Yajun |
| Affiliation: | Li Suoyin Li Jianqiang Wei Ling Wang Yajun(The 13th Reserch Institute, CETC, Shijiazhuang 050051)(Direct Metrology Station of Henan North Hongyang Industrial Group Co, Luoyang 451450)(Hebei Yanxing Mechanical Ltd , Zhangjiakou 075041) |
| Abstract: | This paper introduces the design of comparison method for film thickness instruments, the method of pro- cessing comparison results and how to select comparison period, gives the results of spectrum film thickness instruments and steppers. This method is also suitable for other instruments. It gives the problems that we shoud pay attention to during comparison. |
| Keywords: | comparison film thickness standard |
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