MEMS惯性传感器可靠性试验方法研究

MEMS惯性传感器在军事与商业应用中的一个主要问题便是可靠性试验方法尚未标准化，因而目前绝大多数MEMS惯性传感器器件的可靠性试验依据的是傲电子的试验标准。但是，这些标准对于这类器件的适用性却受到许多机构的质疑，国外关于该问题的研究也已起步。汇总了MEMS惯性传感器器件的结构和工作原理等信息，重点总结了该类器件的典型环境失效机理，并将典型的环境载荷情况与失效机理进行了对比分析：从现有的微电子可靠性试验标准中选取了针对不同环境失效机理的试验方法。并对其适用性问题进行了讨论。

Reliability Test Methods for MEMS Inertial Sensors

One major barrier for applying MEMS inertial sensors in military and commercial fields is that the reliability test methods have not been standardized. Most of the reliability tests for MEMS inertial sensors are based on the test standards for microeleetronics, and their applicability to MEMS are frequently questioned. The study in this domain has already started. In the paper, the structure and working principle of MEMS inertial sensors are summarized. The typical environmental failure mechanisms for this kind of device are presented and their correspondences to the typical environmental loads are analyzed, Based on these, the test methods for different environmental failure mechanisms for MEMS inertial sensors are selected from the current microelectronics reliability test standards, and their applicability is discussed.