| 微机械Golay腔型红外探测器的研究 |
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| 引用本文： | 高翔,徐静,赵本刚,万助军,吴亚明.微机械Golay腔型红外探测器的研究[J].传感器与微系统,2007,26(3):20-23. |
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| 作者姓名： | 高翔 徐静 赵本刚 万助军 吴亚明 |
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| 作者单位： | 1. 中国科学院,上海微系统与信息技术研究所传感技术国家重点实验室,上海,200050;中国科学院,研究生院,北京,100039
2. 中国科学院,上海微系统与信息技术研究所传感技术国家重点实验室,上海,200050 |
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| 摘 要： | 通过分析微机械Golay腔型红外探测器设计中影响性能的关键因素:温致压变系数、红外吸收层、阻尼噪声,提出了一种采用硅和玻璃阳极键合技术实现的新型Golay腔型红外探测器。计算其灵敏度为2 700 pF/W、噪声等效功率为8.4×10-8W/Hz1/2和响应时间为0.5m s。利用光学测量变形,可以实现探测器无电化设计,使得测量不受强电磁场和湿度的影响。
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| 关 键 词： | 微电子机械系统 红外探测器 气动 Golay腔 |
| 文章编号： | 1000-9787（2007）03-0020-04 |
| 收稿时间： | 2006-05-20 |
| 修稿时间： | 05 20 2006 12:00AM |
Research on Golay-cell type infrared detector based on MEMS |
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| GAO Xiang,XU Jing,ZHAO Ben-gang,WAN Zhu-jun,WU Ya-ming.Research on Golay-cell type infrared detector based on MEMS[J].Transducer and Microsystem Technology,2007,26(3):20-23. |
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| Authors: | GAO Xiang XU Jing ZHAO Ben-gang WAN Zhu-jun WU Ya-ming |
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| Affiliation: | 1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences , Shanghai 200050, China ; 2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | The key factors are analyzed in designing a micromachined infrared detector based on the principle of the Golay cell,including thermal-pressure coefficient,infrared absorption layer and damping noise.A new prototype with Si-glass anodic bonding technology is presented.The device sensitivity is 2 700 pF/W,noise equivalent power is 8.4×10-8W/Hz1/2 and response time is 0.5 ms.With optical displacement meter,non-electricity detection can be realized,which helps to avoid the effect of strong electromagnetic field and humidity. |
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| Keywords: | MEMS infrared detector pneumatic Golay cell |
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