Status and prospects of micro- and nanoelectromechanics |
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Authors: | E G Kostsov |
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Affiliation: | (1) Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090, Russia |
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Abstract: | Micro-electro-mechanical systems (MEMS) are devices that display the most intense development in modern microelectronics. At the moment, however, the majority of electronic engineers and users of hi-tech devices do not possess sufficient general information about this new direction in microelectronics. The present paper describes the current status of this direction, numerous possible applications, and prospects of its further development, including the transition to the nanometer range and creation of nanoelectronic elements. Specific features of operation of some particular MEMS devices, their characteristics, and areas and scales of applications are considered. |
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Keywords: | microelectromechanics MEMS electromechanical conversion of energy microelectronics microoptics optoelectromechanics adaptive optics frequency generator accelerometer gyroscope microactuator nanoelectromechanics RF commutator RF filter pressure sensors |
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