300 MHz氮化铝轮廓模式谐振器的设计

氮化铝轮廓模式谐振器(CMR)能够满足现代无线通信对单片、多频段、可重构的多频率源的需求,具有很大的应用前景。针对目前无具体单个CMR频点的设计方法,提出了一种结合CMR性能参数的影响因素分析和有限元计算的CMR设计方法。该文对CMR的谐振频率、质量因子、机电耦合系数和动态电阻等谐振器主要性能参数的影响因素进行理论分析得到CMR结构的初始尺寸,再利用COMSOL有限元软件建立CMR几何模型并进行频域求解得到相应的频率-导纳曲线和频率-质量因子曲线;根据仿真结果和理论计算对CMR初始结构尺寸进行优化,并仿真设计了一个氮化铝CMR,其谐振频率为300 MHz,质量因子约为1 010,机电耦合系数约为1.64%。

Design of 300 MHz AlN Contour Mode Resonator

AlN contour mode resonator (CMR) can meet the needs of modern wireless communication for single chip, multi band, reconfigurable multi frequency sources, and has great application prospects. Aiming at the current design method without a specific single CMR frequency point, a CMR design method combining the influence factor analysis of CMR performance parameters and the finite element calculation is proposed in this paper. Firstly, the influence factors of the main performance parameters of CMR, such as the resonance frequency, the quality factor, the electromechanical coupling coefficient and the dynamic resistance, are analyzed theoretically to get the initial size of the CMR; Then the geometric model of CMR is established by using COMSOL finite element software and the corresponding frequency admittance curve and frequency quality factor curve are obtained by solving frequency domain. According to the simulation results and theoretical calculations, the initial structural size of CMR is optimized and simulated. An AlN CMR with resonant frequency of 300 MHz, quality factor of about 1 010 and electromechanical coupling coefficient of about 1.64% is designed.