| 制备工艺对氧化钨电致变色薄膜性能的影响 |
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| 引用本文： | 罗畅,周白杨,黄涛,吴武地. 制备工艺对氧化钨电致变色薄膜性能的影响[J]. 功能材料与器件学报, 2012, 18(2): 165-171 |
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| 作者姓名： | 罗畅 周白杨 黄涛 吴武地 |
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| 作者单位： | 1. 福州大学材料科学与工程学院,福州,350108
2. 福州大学至诚学院材料工程系,福州,350002 |
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| 摘 要： | 采用WO3陶瓷靶,运用射频反应磁控溅射工艺,通过正交试验方法优化实验参数,制备出性能优异的WO3电致变色薄膜,通过对薄膜进行真空热处理,提高了薄膜变色存储能力。结果表明,氧分量为60%、压强为2.5Pa、功率为145W时制备的薄膜,对光调制幅度(ΔT)达89.3%。适度温度真空热处理可改善薄膜性能,着色率略有提高,变色存储时间增加(达32h),离子存储能力增大(达3.96mC/cm2),循环稳定性能良好,同时热处理使薄膜晶化,密度增加,变色响应时间增加。
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| 关 键 词： | WO3薄膜 射频反应磁控溅射 真空热处理 电致变色 |
Impact of Preparation Technique on the Electrochromic Properties of Tungstic Oxide Film |
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| LUO Chang , ZHOU Bai-yang , HUANG Tao , WW Wu-di. Impact of Preparation Technique on the Electrochromic Properties of Tungstic Oxide Film[J]. Journal of Functional Materials and Devices, 2012, 18(2): 165-171 |
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| Authors: | LUO Chang ZHOU Bai-yang HUANG Tao WW Wu-di |
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| Affiliation: | LUO Chang1,ZHOU Bai-yang1,HUANG Tao1,WW Wu-di2(1.College of Materials Science and Engineering,Fuzhou University,Fuzhou 350108,China; 2.Department of Materials Engineering,Zhicheng College,Fuzhou University,Fuzhou 350002,China) |
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| Abstract: | Electrochromic film was fabricated with a tungstic oxide target by the RF reactive magnetron process.Orthogonal test method was used to optimize process parameters and then to design excellent performance Electrochromic film.Heat treatment process was adopted to improve the endurance of electrochromic performance.Results showed that Electrochromic properties improved Significant.Variation of the transmittance(ΔT) can reach 89.3% in the preparation condition of w(O)=60%,p=2.5Pa and P=145w.Coloring rate increased slightly while,duration of Electrochromic state and ion storage capacity can extend to 32 h and 3.96 mC/cm2,respectively;simultaneously,cycling stability,crystallization,density and electrochromic response time were ameliorated under justifiable heat treatment process. |
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| Keywords: | WO3 film RF reactive magnetron process heat treatment electrochromic properties |
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